Brennan, D and Alderman, J and Sattler, L and Walshe, J and Huang, J and O'Connor, B and O'Mathuna, C

2002

Infrared Physics & Technology

Development of a micro-spectrometer system for process control application

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Increasingly micro-system components are being developed using existing micro-electronics fabrication technology for a diverse range of applications. Such components are being integrated into sensor and transducer systems in telecommunications, bio-medical applications and in process control. These systems are often small and robust compared to predecessor systems and their components offer the benefits of using micro-electronic fabrication techniques. One such available component is a micro-spectrometer developed using the LIGA technique to write the system grating, Using such a spectrometer a system was developed for application in process control. This paper outlines the development of hardware and software to implement this system and some results from initial trials. (C) 2002 Elsevier Science B.V. All rights reserved.

10.1016/S1350-4495(01)00128-1