J.-H. Park, M. R. Lazell, D. J. Otway, P. OżBrien;

2000

January

Mat. Res. Soc. Symp. Proc. - Chemical Processing of Dielectrics, Insulators and Electroceramics

Group III Metal Sulfide Thin Films from Single-Source Precursors by Chemical Vapour Deposition (CVD) Techniques

Published

0

606

127

132

Times Cited: 1