J.-H. Park, D. J. Otway, P. OżBrien;

2000

January

Mat. Res. Soc. Symp. Proc.- Chemical Processing of Dielectrics, Insulators and Electroceramics

Iron Sulfide (FeS2) Thin Films from Single-Source Precursors by Aerosol-Assisted Chemical Vapor Deposition (AACVD)

Published

0

606

133

138