Mathewson, A,O'Sullivan, P,Concannon, A,Foley, S,Minehane, S,Duane, R,Palser, K

1999

November

Microelectronic Engineering

Modelling and simulation of reliability for design

Validated

()

ELECTROMIGRATION FAILURE TRANSIENT SIMULATION THIN HOT DEGRADATION DEPENDENCE BREAKDOWN OXIDES

49

95

117

This paper provides a review of the use of simulation tools in the design process. It provides examples of applications where such tools can be effective in improving device functionality: yield, manufacturability and reliability. Topics covered are numerical process and device simulation, electromigration and stress migration simulation as well as circuit simulation and reliability modelling. Specific example of how such simulators work are provided and examples of currently available software tools are reviewed.