Watanabe, S. and Pelucchi, E. and Dwir, B. and Baier, A. and Leifer, K. and Kapon, E.

2004

Physica E-Low-Dimensional Systems & Nanostructures

Growth and optical characterization of dense arrays of site-controlled quantum dots grown in inverted pyramids

Validated

()

21

2-4

We report on the growth and optical properties of dense arrays of single GaAs/AlGaAs quantum dot (QD) heterostructures with pitches as small as 300 nm. The samples were grown by organometallic chemical vapor deposition in dense inverted pyramids on 1 1 1B GaAs substrate pre-patterned using electron beam lithography and wet chemical etching. The growth conditions such as deoxidation and growth temperatures, growth rates, and V/III ratio, had to be chosen quite differently from those employed with micron-size pyramids. Low-temperature micro-photoluminescence and cathodoluminescence spectra of the samples show distinct luminescence from the QDs with a linewidth of less than 1 meV and uniform emission energy for an ensemble of 900 QDs. The possibility of incorporating such QD arrays inside optical microcavity structures is also discussed. (C) 2003 Elsevier B.V. All rights reserved.