Armstrong, S. R.,Hoare, R. D.,Pemble, M. E.,Povey, I. M.,Stafford, A.,Taylor, A. G.,Williams, J. O.

1992

November

Journal of Crystal Growth

The Pyrolysis of Precursors for Gaas Mocvd Studied by Insitu and Exsitu Fourier-Transform Infrared-Spectroscopy

Validated

()

124

1-41-4

10

1510

The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains unclear.The decomposition of arsine at atmospheric pressure as studied by in-situ and ex-situ Fourier transform infrared spectroscopy (FTIR) is presented, comparing the techniques. Ex-situ spectroscopic and spectrometric evidence for the formation of methylarsine and dimethylarsine during the reaction of trimethylgallium and arsine, and in-situ spectroscopic evidence for the formation of diethylarsine during the reaction of triethylgallium and arsine is discussed. The observation of alkylarsines strongly implies a stepwise free radical reaction mechanism, however whether these processes are heterogeneous or homogeneous remains unclear.

0022-02480022-0248

://WOS:A1992KB90500003://WOS:A1992KB90500003