Mandatory Fields

Authors

Hill, M.,O'Mahony, C.,Lambkin, P.,Mathewson, A.

Conference Title

Micromechanics Europe 2003Micromechanics Europe 2003

Title of Paper

Mechanical Reliability Testing and Strength Evaluation of Metal-oxide MEMSMechanical Reliability Testing and Strength Evaluation of Metal-oxide MEMS

Year

2003

Month

November

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

End Page

8581

Location

Delft, NetherlandsDelft, Netherlands

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details