Mandatory Fields

Authors

O'Mahony, C.,Hill, M.,Mathewson, A.

Conference Title

SIE Opto Ireland 2002SIE Opto Ireland 2002

Title of Paper

Analysis of Material Properties for MEMS using Interferometric MeasurementsAnalysis of Material Properties for MEMS using Interferometric Measurements

Year

2002

Month

September

Status

Validated

Peer Reviewed

Times Cited

()

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Keywords

Editors

Start Page

712

End Page

722712

Location

Galway, IrelandGalway, Ireland

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details