Mandatory Fields

Authors

O'Mahony, C.,Hill, M.,Mathewson, A.

Conference Title

Micromechanics Europe 2002Micromechanics Europe 2002

Title of Paper

Simulation of Boundary Effects in Surface Micromachined Fixed-fixed BeamsSimulation of Boundary Effects in Surface Micromachined Fixed-fixed Beams

Year

2002

Month

October

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

169

End Page

172169

Location

Sinai, RomaniaSinai, Romania

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details