Mandatory Fields

Authors

Hill, M.,O'Mahony, C.,Mathewson, A.

Conference Title

Micromechanics Europe 2002Micromechanics Europe 2002

Title of Paper

Investigation of performance and reliability of post-CMOS metal/oxide MEMS structuresInvestigation of performance and reliability of post-CMOS metal/oxide MEMS structures

Year

2002

Month

October

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

327

End Page

330327

Location

Sinai, RomaniaSinai, Romania

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details