Mandatory Fields

Authors

Hill, M.,O'Mahony, C.,Hughes, PJ,Lane, B.,Mathewson, A.

Conference Title

IEEE International Conference on Microelectronic Test StructuresIEEE International Conference on Microelectronic Test Structures

Title of Paper

Test structures for a MEMS SiOx/metal processTest structures for a MEMS SiOx/metal process

Year

2002

Month

April

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

203

End Page

210203

Location

Cork, IrelandCork, Ireland

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details