Peer-Reviewed Journal Details
Mandatory Fields
Saura, X., Su, J., Monaghan, S., Hurley, P.K., Miranda, E.
2013
October
Journal of Applied Physics
Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics
Published
WOS: 6 ()
Optional Fields
Breakdown Metal-Insulator-Metal Capacitor Spatial distribution Statistical analysis
114
15
154112

The breakdown spot spatial distribution in Pt/HfO2/Pt capacitors is investigated using nearest neighbor statistics in combination with more conventional estimation methods such as the point-event and event-event distance distributions. The spots appear as a random point pattern over the top metal electrode and arise as a consequence of significant localized thermal effects caused by the application of high-voltage ramped stress to the devices. The reported study mainly involves the statistical characterization of the distances between each failure site and the nearest, second nearest,⋯ kth nearest event and the comparison with the corresponding theoretical distributions for a complete spatial randomness (CSR) process. A method for detecting and correcting deviations from CSR based on a precise estimation of the average point intensity and the effective damaged device area is proposed.

USA
00218979
10.1063/1.4825321
Grant Details