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Mandatory Fields
Wieczorek, Andreas and Djara, Vladimir and Peters, Frank H and OCallaghan, James and Thomas, Kevin and Corbett, Brian
2012
January
Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures
Inductively coupled plasma deep etching of InP/InGaAsP in Cl 2/CH 4/H 2 based chemistries with the electrode at 20 C
Validated
Optional Fields
30
5
051208
051208
Grant Details