Riza, N. A.,Polla, D. L.,Robbins, W. P.,Glumac, D. E.

1993

September

Electronics Letters

HIGH-RESOLUTION 50 NM LINEAR DISPLACEMENT MACROSCALE MEANDER-LINE PZT ACTUATOR

Validated

()

29

1818

1606

16081606

A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.A high resolution < 50 nm piezoelectric meander-line actuator is experimentally demonstrated using a macroscale model made of 22 bars of PZT. The high resolution displacement measurements are taken using a Michelson optical interferometer. Linear, stable, displacement behaviour with no hysteresis is demonstrated for low (< 100 V) applied voltages.

0013-51940013-5194

://WOS:A1993MG40700010://WOS:A1993MG40700010