More Journal Details
Mandatory Fields
Hopfe, V and Sheel, DW and Spee, CIMA and Tell, R and Martin, P and Beil, A and Pemble, M and Weiss, R and Vogt, U and Graehlert, W
2003
January
Thin Solid Films
In-situ monitoring for CVD processes
Validated
Optional Fields
442
1
60
65
Grant Details