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Authors

Hodgkinson, John L and Sheel, David W and Yates, Heather M and Pemble, Martyn E

Year

2006

Month

January

Journal

Plasma Processes and Polymers

Title

Atmospheric pressure glow discharge CVD of Al2O3 thin films

Status

Validated

Peer Reviewed

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Keywords

Volume

3

Issue

8

Start Page

597

End Page

605

Abstract

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ISBN / ISSN

Edition

URL

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