Djara, Vladimir and Cherkaoui, Karim and Schmidt, Michael and Monaghan, Scott and O'Connor, Eamon and Povey, Ian M and O'Connell, Dan and Pemble, Martyn E and Hurley, Paul K

2012

January

Impact of Forming Gas Annealing on the Performance of Surface-Channel MOSFETs With an ALD Gate Dielectric

Validated

()

59

4

1084

1090