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Authors

Pemble, Martyn and Povey, Ian and Chalvet, Francis

Year

2007

Month

January

Journal

ECS Transactions

Title

Developments in the Understanding of ALD Processes and Applications of ALD in Critical Technologies

Status

Validated

Peer Reviewed

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Keywords

Volume

11

Issue

7

Start Page

155

End Page

166

Abstract

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ISBN / ISSN

Edition

URL

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