More Journal Details

Mandatory Fields

Authors

O'Mahony, Aileen and Povey, Ian M and Pemble, Martyn E

Year

2008

Month

January

Journal

ECS Transactions

Title

In-situ probing of atomic layer deposition processes using infrared and near infrared spectroscopy

Status

Validated

Peer Reviewed

Optional Fields

Keywords

Volume

16

Issue

4

Start Page

349

End Page

354

Abstract

Publisher Location

Editors

Publisher

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details