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Mandatory Fields

Authors

O'Mahony, Aileen and Povey, Ian M and Pemble, Martyn E

Year

2008

Month

January

Journal

Meeting Abstracts

Title

Real Time In-Situ Probing of Atomic Layer Deposition Processes using Infrared and Near Infrared Spectroscopy

Status

Validated

Peer Reviewed

Optional Fields

Keywords

Volume

Issue

24

Start Page

1911

End Page

1911

Abstract

Publisher Location

Editors

Publisher

ISBN / ISSN

Edition

URL

DOI Link

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