PEMBLE, ME and TWEDDELL, I

1995

January

Advances in Inorganic Films and Coatings: Proceedings of Topical Symposium I on Advances in Inorganic Films and Coatings of the 8th CIMTEC-World Ceramics Congress and Forum on New Materials, Florence, Italy June 28 to July 4, 1994

SURFACE AND GAS PHASE STUDIES OF THE CHEMICAL VAPOUR DEPOSITION OF SILICON CARBIDE ON TUNGSTEN FROM DICHLOROMETHYLSILANE

Validated

5

175