Mandatory Fields

Authors

Sun, W., Mughal, M.J., Noell, W. Perez, F, Riza, N.A. and de Rooij, N.F.

Conference Title

12th IEEE Int. Conf. on Solid State Sensors, Actuators and MicroSystems, Paper 4D.1.4.

Title of Paper

A Bulk Micromachined Tiltable Mirror Array Digital Variable Optical Attenuator

Year

2003

Month

June

Status

In Press

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

End Page

Location

Boston, USA

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details