Mandatory Fields

Authors

López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J.G.M., Verheijen, M.A., Kaiser, M.

Year

2008

Month

January

Journal

Title

Si interstitial contribution of F+ implants in crystalline Si

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

103

Issue

Start Page

End Page

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

http://www.scopus.com/inward/record.url?eid=2-s2.0-43949117448&partnerID=40&md5=1679a31e129faee4b63d64fbe4a0727d

DOI Link

Grant Details

Funding Body

Grant Details