Mandatory Fields

Authors

López, P., Pelaz, L., Duffy, R., Meunier-Beillard, P., Roozeboom, F., Van Der Tak, K., Breimer, P., Van Berkum, J.G.M., Verheijen, M.A., Kaiser, M.

Year

2008

Month

January

Journal

Title

Evolution of fluorine and boron profiles during annealing in crystalline Si

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

Issue

Start Page

377

End Page

381

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

http://www.scopus.com/inward/record.url?eid=2-s2.0-38849085983&partnerID=40&md5=c535d01c015612ae98861b7a80840373

DOI Link

Grant Details

Funding Body

Grant Details