Mandatory Fields

Authors

Vandervorst, W., Jurczak, M., Everaert, J.-L., Pawlak, B.J., Duffy, R., Del-Agua-Bomiquel, J.-I., Poon, T.

Year

2008

Month

January

Journal

Title

Probing doping conformality in fin shaped field effect transistor structures using resistors

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

Issue

Start Page

396

End Page

401

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

http://www.scopus.com/inward/record.url?eid=2-s2.0-38849086817&partnerID=40&md5=53dae968672a3d41748914beadfac74f

DOI Link

Grant Details

Funding Body

Grant Details