Lindsay, R., Henson, K., Vandervorst, W., Maex, K., Pawlak, B.J., Duffy, R., Surdeanu, R., Stolk, P., Kittl, J.A., Giangrandi, S., Pages, X., Van der Jeugd, K.

2004

January

Leakage optimization of ultra-shallow junctions formed by solid phase epitaxial regrowth

Validated

()

22

1

306

311

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