Mandatory Fields

Authors

Duffy, R., Venezia, V.C., Heringa, A., Hüsken, T.W.T., Hopstaken, M.J.P., Cowern, N.E.B., Griffin, P.B., Wang, C.C.

Year

2003

Month

January

Journal

Title

Boron uphill diffusion during ultrashallow junction formation

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

Issue

Start Page

3647

End Page

3649

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

http://www.scopus.com/inward/record.url?eid=2-s2.0-0038645959&partnerID=40&md5=801f76e508ea327e0d038c15c657aa37

DOI Link

Grant Details

Funding Body

Grant Details