Conference Publication Details

Mandatory Fields

Authors

Jackson, N; O'Keeffe, R; O'Neill, M; Waldron, F; Mathewson, A

Conference Title

SPIE Microtechnologies

Title of Paper

CMOS compatible Low Frequency Aluminium Nitride MEMS piezoelectric energy harvesting device

Year

2013

Month

April

Status

Published

Peer Reviewed

1

Times Cited

()

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Abstract

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