Conference Publication Details

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Authors

Jackson, N; O'Keeffe, R; O'Neill, M; Waldron, F; Mathewson, A

Conference Title

IEEE Conference on Microelectronic Test Structures

Title of Paper

A diaphragm based piezoelectric AlN film quality test structure

Year

2012

Month

March

Status

Published

Peer Reviewed

1

Times Cited

()

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Abstract

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