Burke, Micheal, Blake, Alan, Djara, Vladimir, O'Connell, Dan, Povey, Ian M, Cherkaoui, Karim, Monaghan, Scott, Scully, Jim, Murphy, Richard and Hurley, Paul K, Pemble, Martyn E and others

2015

January

Journal of Vacuum Science Technology A: Vacuums, Surfac

High aspect ratio iridescent three-dimensional metal--insulator--metal capacitors using atomic layer deposition

Validated

()

33

1

01A103