Conference Publication Details
Mandatory Fields
Weglicki, PS; Cao, Z; Skillen, NW; Owen, JR; Moseley, PT;
Seventh European Conference on Chemical Vapour Deposition
CVD and Plasma MOCVD of Metal Oxide Films
1989
May
Published
1
()
Optional Fields
C5-779 - C5-779
C5-779 - C5-779
France
10.1051/jphyscol:1989594
Grant Details