Conference Publication Details
Mandatory Fields
Jackson, N and O'Keeffe, R and O'Leary, R and O'Neill, M and Waldron, F and Mathewson, A
Microelectronic Test Structures (ICMTS), 2012 IEEE International Conference on
A diaphragm based piezoelectric AlN film quality test structure
2012
January
Validated
()
Optional Fields
50
54
Grant Details