Jackson, Nathan and O’Keeffe, Rosemary and Waldron, Finbarr and O’Neill, Mike and Mathewson, Alan

2013

January

Journal Of Micromechanics And Microengineeringjournal Of Micromechanics And Microengineering

Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance

Published

()

23

7

075014