More Journal Details
Mandatory Fields
Decams, J.M. and Guillon, H. and Jiménez, C. and Audier, M. and Sénateur, J.P. and Dubourdieu, C. and Cadix, O. and O'Sullivan, B.J. and Modreanu, M. and Hurley, P.K. and Rusworth, S. and Leedham, T.J. and Davies, H. and Fang, Q. and Boyd, I.
2005
January
Microelectronics Reliability
Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
Validated
Optional Fields
45
5-6
929
932
http://www.scopus.com/inward/record.url?eid=2-s2.0-20044369890&partnerID=40&md5=bbca268362c63ccdf82008aaef2ab7c8
Grant Details