Peer-Reviewed Journal Details
Mandatory Fields
Decams, J. M.,Guillon, H.,Jimenez, C.,Audier, M.,Senateur, J. P.,Dubourdieu, C.,Cadix, O.,O'Sullivan, B. J.,Modreanu, M.,Hurley, P. K.,Rusworth, S.,Leedham, T. J.,Davies, H.,Fang, Q.,Boyd, I.
2005
June
Microelectronics Reliabilitymicroelectronics Reliability
Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
Validated
()
Optional Fields
45
5-65-6
929
932
0026-27140026-2714
://WOS:000227914200039://WOS:000227914200039
Grant Details