Mandatory Fields

Authors

Fang, Q.,Liaw, I.,Modreanu, M.,Hurley, P. K.,Boyd, I. W.

Year

2005

Month

June

Journal

Microelectronics Reliabilitymicroelectronics Reliability

Title

Post deposition UV-induced O(2) annealing of HfO(2) thin films

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

Issue

5-65-6

Start Page

957

End Page

960

Abstract

Publisher Location

ISBN / ISSN

0026-27140026-2714

Edition

URL

://WOS:000227914200046://WOS:000227914200046

DOI Link

Grant Details

Funding Body

Grant Details