Mandatory Fields

Authors

O’Mahony, Conor and Hill, Martin and Brunet, Magali and Duane, Russell and Mathewson, Alan

Year

2003

Month

January

Journal

Measurement Science and Technology

Title

Characterization of micromechanical structures using white-light interferometry

Status

Validated

Peer Reviewed

Optional Fields

Keywords

Volume

Issue

Start Page

1807

End Page

Abstract

Publisher Location

Editors

Publisher

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details