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Mandatory Fields

Authors

Hill, M and Duane, R and Mathewson, A and others

Year

2003

Month

January

Journal

Journal of Micromechanics and Microengineering

Title

Performance and reliability of post-CMOS metal/oxide MEMS for RF application

Status

Validated

Peer Reviewed

Optional Fields

Keywords

Volume

13

Issue

4

Start Page

S131

End Page

Abstract

Publisher Location

Editors

Publisher

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details