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Authors

O’Sullivan, BJ and Hurley, PK and Mathewson, A and Das, JH and Daniel, AD

Year

2000

Month

January

Journal

Microelectronics Reliability

Title

Interface properties of the Si (100)--SiO< sub> 2 system formed by rapid thermal oxidation

Status

Validated

Peer Reviewed

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Keywords

Volume

40

Issue

4

Start Page

645

End Page

648

Abstract

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ISBN / ISSN

Edition

URL

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