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Mandatory Fields

Authors

O'Mahony, C and Duane, R and Hill, M and Mathewson, A

Year

2005

Month

January

Journal

Electronics Letters

Title

Low-voltage micromechanical test structures for measurement of residual charge in dielectrics

Status

Validated

Peer Reviewed

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Keywords

Volume

41

Issue

7

Start Page

409

End Page

411

Abstract

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ISBN / ISSN

Edition

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