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Authors

Donnelly, J and O'Neill, B and Mathewson, A

Year

1989

Month

January

Journal

Applied Surface Science

Title

Characterisation of furnace-annealed TiSi< sub> 2 for VLSI circuit applications

Status

Validated

Peer Reviewed

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Keywords

Volume

38

Issue

1

Start Page

447

End Page

457

Abstract

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ISBN / ISSN

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