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Authors

Hynes, E and Elebert, P and McAuliffe, D and Doyle, D and O'Neill, M and Lane, WA and Berney, H and Hill, M and Mathewson, A

Conference Title

Electron Devices Meeting, 2001. IEDM'01. Technical Digest. International

Title of Paper

The CAP-FET, a scaleable MEMS sensor technology on CMOS with programmable floating gate

Year

2001

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

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Abstract

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