Mandatory Fields

Authors

Hill, Martin and O'Mahony, Conor and Hughes, PJ and Lane, Bill and Mathewson, Alan

Conference Title

Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on

Title of Paper

Test structures for a MEMS SiO x/metal process

Year

2002

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

203

End Page

210

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details