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Authors

Hurley, PK and Rodrigues, R and Kay, P and Thakur, RPS and Clarke, D and Sheehan, E and Mathewson, A

Conference Title

Plasma Process-Induced Damage, 1999 4th International Symposium on

Title of Paper

Plasma process induced degradation of thin inter-polysilicon dielectric layers

Year

1999

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

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