Achard, H and Mermet, JL and Bono, H and Joly, JP and Monroy, A and Chapuis, D and Cahill, CG and Dunne, B and Mathewson, A

SOS/SOI Technology Workshop, 1988. Proceedings., 1988 IEEE

Contribution to 3D SOI integration technologies using seeded laser ZMR and polycide refractory metallisation

1988

January

Validated

()

66