Mandatory Fields

Authors

Kalnitsky, Alex and Hurley, P and Lepert, Arnaud and Mallardeau, C and Sheehan, Eoin and Mathewson, A

Conference Title

Solid State Device Research Conference, 1995. ESSDERC'95. Proceedings of the 25th European

Title of Paper

Phosphorus in the Polysilicon TiSi 2 System: Dopant Redistribution

Year

1995

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

371

End Page

374

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details