Foley, S and Chan Tung, N and Gounelle, C and Wyborn, G and Louwers, S and Mathewson, A

1998

January

MRS Proceedings

Evaluation of the Electromigration Performance of New Aluminium Via Plug-Fill Techniques for 0.25 $\mu$m and 0.18 $\mu$m Technologies

Validated

516

305