Mandatory Fields

Authors

MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A

Year

2003

Month

January

Journal

IEEE Transactions on Semiconductor Manufacturing

Title

SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization

Status

Published

Times Cited

()

Optional Fields

Keywords

Volume

Issue

Start Page

207

End Page

214

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details