Mandatory Fields

Authors

Wrixon, Robert and O'Sullivan, P and Mathewson, A

Conference Title

Solid State Device Research Conference, 1994. ESSDERC'94. 24th European

Title of Paper

Highly Uniform RTP Growth and Characterisation of Ultra-Thin Oxynitride Dielectrics Grown in N 2 O

Year

1994

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

End Page

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details