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Authors

Williams, DA and McMahon, RA and Ahmed, H and Barfoot, KM and Godfrey, DJ and Dunne, B and Mathewson, A

Year

1987

Month

January

Journal

MRS Proceedings

Title

TEM and SEM Studies of Multiple Silicon on Insulator Films for Three Dimensional Circuits.

Status

Validated

Peer Reviewed

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Keywords

Volume

107

Issue

Start Page

235

End Page

Abstract

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Publisher

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Edition

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